Structural properties of Ge-Sb-Te alloys

Abstract

In this work, we have investigated the structural properties of Germanium (Ge)-Antimony (Sb)-Tellurium (Te) (GST) and Ge-rich GST thin film samples. The structural properties of the films are studied after annealing temperatures from room temperature to 450 °C. We performed the annealing procedure using a heat rate of 10 °C/min to achieve the target temperature for a duration of 10 min under N<inf>2</inf> flow. After heat treatment, we carried out X-Ray Diffraction (XRD), Fourier Infra-Red Spectroscopy (FTIR), Raman Spectroscopy and Scanning Electron Microscopy (SEM) equipped with Energy-dispersive X-ray spectroscopy (EDS) to investigate the evolution of the structure in the samples. © 2021 Elsevier B.V., All rights reserved.